MIS - Field effect sensors for low concentration of H2S for environmental monitoring

Procedia Engineering

Volumn 5, Issue , 2010, Pages 1216-1219

  Kalinina, L N ^a   Litvinov, A V ^a   Nikolaev, I N ^a   Samotaev, N N ^a  

^a NATIONAL RESEARCH NUCLEAR UNIVERSITY MEPHI   (Russian Federation)

Author keywords

Field effect; Gas sensor; Hydrogen sulphide

Indexed keywords

CHEMICAL SENSORS; GAS DETECTORS; HYDROGEN SULFIDE; METAL INSULATOR BOUNDARIES; MIS DEVICES; PALLADIUM; SEMICONDUCTING SILICON; SILICON; TANTALUM OXIDES;

DETECTION LEVELS; ENVIRONMENTAL MONITORING; FE SENSORS; FIELD EFFECT SENSORS; FIELD EFFECTS; LOW CONCENTRATIONS; METAL-INSULATOR-SEMICONDUCTORS; SENSOR OPERATIONS;

TANTALUM;

EID: 78650596922     PISSN: None     EISSN: 18777058     Source Type: Conference Proceeding    
DOI: 10.1016/j.proeng.2010.09.331     Document Type: Conference Paper

References (8)

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