Ion beam figuring of high-slope surfaces based on figure error compensation algorithm

Applied Optics

Volumn 49, Issue 34, 2010, Pages 6630-6636

  Dai, Yifan ^a   Liao, Wenlin ^a   Zhou, Lin ^a   Chen, Shanyong ^a   Xie, Xuhui ^a  

^a NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR COMPENSATION; ERRORS; FUSED SILICA; IONS;

COMPENSATION ALGORITHM; CONVEX SURFACES; INCIDENCE ANGLES; ION BEAM FIGURING; RADIUS OF CURVATURE; REMOVAL CHARACTERISTICS; REMOVAL FUNCTION; ROOT MEAN SQUARE;

ION BEAMS;

EID: 78650430276     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.49.006630     Document Type: Article

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