Fabrication and evaluation of a MEMS piezoelectric bimorph generator for vibration energy harvesting

Journal of Mechanics

Volumn 26, Issue 4, 2010, Pages 493-499

  Lee, B S ^a   Lin, S C ^a   Wu, W J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

MEMS generator; Piezoelectric bimorph; Power harvesting; PZT fabrication

Indexed keywords

ENERGY HARVESTING; FABRICATION; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; POLARIZATION; VIBRATIONS (MECHANICAL);

MAXIMUM OUTPUT POWER; MEMS GENERATOR; OPEN-CIRCUIT OUTPUT VOLTAGES; PARALLEL POLARIZATION; PIEZOELECTRIC BIMORPHS; POWER HARVESTING; RESONANCE FREQUENCIES; VIBRATION ENERGY HARVESTING;

ELECTRIC GENERATORS;

EID: 78650423947     PISSN: 17277191     EISSN: None     Source Type: Journal    
DOI: 10.1017/S172771910000469X     Document Type: Article

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