Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films

Journal of Materials Science and Technology

Volumn 26, Issue 11, 2010, Pages 986-990

  Srivastava, A K ^a   Praveen, ^a   Arora, M ^a   Gupta, S K ^a   Chakraborty, B R ^a   Chandra, S ^b   Toyoda, S ^c   Bahadur, H ^a  

^a NATIONAL CHEMICAL LABORATORY   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

^c OKAYAMA UNIVERSITY OF SCIENCE   (Japan)

Author keywords

Electron microscopy; Electron paramagnetic resonance; Nanomaterials; Photoluminescence; RF sputtering; Spectroscopy; ZnO

Indexed keywords

COLUMNAR GRAIN; ELECTRON MICROGRAPH; ELECTRON PARAMAGNETIC RESONANCE; EMISSION PEAKS; HIGH RESOLUTION; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPES; INTRINSIC DEFECTS; LATTICE SCALE; NANO-GRAINED THIN FILMS; NANO-MATERIALS; NANO-SCALED DEVICES; NANO-STRUCTURED; NANOSTRUCTURAL; OPTICAL PERFORMANCE; PHOTOLUMINESCENCE MEASUREMENTS; POTENTIAL APPLICATIONS; PREFERRED GROWTH; RADIO FREQUENCIES; RF MAGNETRONS; RF-SPUTTERING; SILICON SUBSTRATES; SINGLE-CRYSTALLINE; VIBRATIONAL MODES; ZNO; ZNO THIN FILM;

ELECTRON RESONANCE; ELECTRON SPIN RESONANCE SPECTROSCOPY; ELECTRONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; NANORODS; NANOSTRUCTURED MATERIALS; OXIDE FILMS; PARAMAGNETIC MATERIALS; PARAMAGNETISM; PHOTOLUMINESCENCE; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SURFACE TOPOGRAPHY; THIN FILMS; TOPOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

PARAMAGNETIC RESONANCE;

EID: 78650357356     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1005-0302(10)60161-2     Document Type: Article

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