Highly textured (001) aln nanostructured thin films synthesized by reactive magnetron sputtering for saw and fbar applications

Digest Journal of Nanomaterials and Biostructures

Volumn 5, Issue 4, 2010, Pages 1041-1054

  Stan, G E ^a   Pasuk, I ^a   Galca, A C ^a   Dinescu, A ^b  

^a NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

AlN films; Magnetron reactive sputtering; Microstrain; Optical properties; Texture

Indexed keywords

EQUUS ASINUS;

EID: 78650055144     PISSN: None     EISSN: 18423582     Source Type: Journal    
DOI: None     Document Type: Article

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