The formation of a dual-layer carbon film on silicon carbide using a combination of carbide-derived carbon process and chemical vapor deposition in a CCl4 - Containing atmosphere

Carbon

Volumn 49, Issue 2, 2011, Pages 732-736

  Sui, Jian ^a,b   Lu, Jinjun ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; CHLORINATION; CHLORINE COMPOUNDS; FILM GROWTH; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; THERMOGRAVIMETRIC ANALYSIS; X RAY DIFFRACTION;

CARBIDE DERIVED CARBON; CHEMICAL VAPOR DEPOSITIONS (CVD); DUAL LAYER; FORMATION MECHANISM; PYROLYZING; SUB-LAYERS; TOP LAYERS;

CHEMICAL VAPOR DEPOSITION;

EID: 78649916841     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2010.10.026     Document Type: Letter

References (9)

1. Y. Gogotsi, R.K. Dash, G. Yildirim, T. Yildirim, G. Laudisio, and J.E. Fischer Tailoring of nanoscale porosity in carbide-derived carbons for efficient hydrogen storage J Am Chem Soc 127 46 2005 16006 16007
2. D.A. Ersoy, M.J. McNallan, and Y. Gogotsi Platinum reactions with carbon coatings produced by high temperature chlorination of silicon carbide J Electrochem Soc 148 2001 774 779
3. J. Chmiola, C. Largeot, P.-L. Taberna, P. Simon, and Y. Gogotsi Monolithic carbide-derived carbon films for micro-supercapacitors Science 328 2010 480 483
4. Y. Gogotsi, I.D. Jeon, and M.J. McNallan Carbon coatings on silicon carbide by reaction with chlorine-containing gases J Mater Chem 7 1997 1841 1848
5. G.N. Yushin, E.N. Hoffman, A. Nikitin, H.H. Ye, M.W. Barsoum, and Y. Gogotsi Synthesis of nanoporous carbide-derived carbon by chlorination of titanium silicon carbide Carbon 43 2005 2075 2082 (Pubitemid 41004956)
6. A. Nikitin, and Y. Gogotsi Nanostructured carbide-derived carbon H.S. Nalwa, Encyclopedia of nanoscience and nanotechnology vol. 7 2003 American Scientific Publishers CA 553 574
7. + on diamond-like carbon films J Appl Phys 72 1992 69 72
8. K.J. Grannen, and R.P.H. Chang Diamond growth on carbide surfaces using a selective etching technique J Mater Res 9 8 1993 2154 2163
9. S. Welz, M.J. McNallan, and Y. Gogotsi Carbon structures in silicon carbide derived carbon J Mater Proc Technol 179 2006 11 22