Range parameters of heavy ions in light targets

Proceedings of the International Conference on Ion Implantation Technology

Volumn , Issue , 2000, Pages 235-238

  Kuzmin, V ^a   Didyk Flerov, A ^a  

^a JOINT INSTITUTE FOR NUCLEAR RESEARCH   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

C FILMS; ENERGY RANGES; EXPERIMENTAL DATA; TRANSPORT THEORY; ZIEGLER , BIERSACK AND LITTMARK;

CESIUM; ION IMPLANTATION; KRYPTON; LEAD; POLYSTYRENES; STATISTICAL MECHANICS;

CESIUM COMPOUNDS;

EID: 78649820649     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/.2000.924133     Document Type: Conference Paper

References (11)

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2. J.F. Ziegler, J.P. Biersack, and U. Littmark, "The stopping and range of ions in solids," New York: Pergamon, 1985; updated stopping cross section data are contained in SRIM2000.
3. P.L. Grande, F.C. Zawislak, D. Fink, and M. Behar, "Range parameters study of medium-heavy ions implanted into light substrates," Nucl. Instr. and Meth., vol. B61,pp. 282-290, 1991.
4. J.H. Liang, "Range parameters of bismuth ions in polystyrene", Nucl. Instr. and Meth., vol. B132, pp.29-35, 1997.
5. U. Littmark and J.F. Ziegler, "Ranges of energetic ions in matter", Phys. Rev. A, vol. 23, pp.64-72, January 1981.
6. J. Lindhard, M.Scharff, and K. Schiertt, "Range concepts and heavy ion ranges", Mat. Fys. Medd. Dan. Vid. Selsk., 33, no. 14, 1963.
7. W.D. Wilson, L.G. Haggmark, J.P. Biersack, "Calculations of nuclear stopping, ranges, and straggling in the low-energy region", Phys. Rev., B, vol. 15, pp. 2458-2468, March 1977.
8. O.S. Oen and M.T. Robinson, "Computer studies of the reflection of light ions from solids", Nucl. Instr. and Meth., vol. 132, pp. 647-653, 1976.
9. V. Kuzmin, "Damage profile induced by ion implantation in amorphous materials", unpublished.
10. O.B. Firsov, "Calculation of the interaction potential of atoms", Sov. Phys.-JETP, vol. 7, pp.308-312, 1958
11. [Zh. Exp. Teor. Fiz., vol. 33, pp.696-699].