Low-loss strip-loaded slot waveguides in Silicon-on-Insulator

Optics Express

Volumn 18, Issue 24, 2010, Pages 25061-25067

  Ding, Ran ^a   Baehr Jones, Tom ^a   Kim, Woo Joong ^b   Xiong, Xugang ^a   Bojko, Richard ^a   Fedeli, Jean Marc ^c   Fournier, Maryse ^c   Hochberg, Michael ^a  

^a University of Washington   (United States)

^b SEATTLE UNIVERSITY   (United States)

^c CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; LIGHT MODULATORS;

1550 NM; DRIVE VOLTAGE; ELECTRO-OPTIC POLYMERS; HIGH BANDWIDTH; LOW LOSS; LOW-LOSS WAVEGUIDES; OPTICAL INSERTION LOSS; SILICON ON INSULATOR; SILICON THICKNESS; SLOT SIZES; SLOT WAVEGUIDE; WAVEGUIDE LOSS;

WAVEGUIDES;

EID: 78649711068     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.025061     Document Type: Article

References (23)

1. V. R. Almeida, Q. F. Xu, C. A. Barrios, and M. Lipson, "Guiding and confining light in void nanostructure," Opt. Lett. 29(11), 1209-1211 (2004).
2. M. Hochberg, T. Baehr-Jones, G. Wang, J. Huang, P. Sullivan, L. Dalton, and A. Scherer, "Towards a millivolt optical modulator with nano-slot waveguides," Opt. Express 15(13), 8401-8410 (2007).
3. W. Freude, J. Leuthold, L. Alloatti, T. Vallaitis, D. Korn, R. Palmer, C. Koos, J. Brosi, P. Dumon, R. Baets, M. L. Scimeca, I. Biaggio, B. Breiten, F. Diederich, A. Barklund, R. Dinu, and J. Wieland, "100 Gbit/s electro-optic modulator and 56 Gbit/s wavelength converter for DQPSK data in silicon-organic hybrid (SOH) technology," Photonics Society Summer Topical Meeting Series, 2010 IEEE, (Academic, Playa del Carmen, 2010), pp 96 - 97.
4. L. Alloatti, D. Korn, D. Hillerkuss, T. Vallaitis, J. Li, R. Bonk, R. Palmer, T. Schellinger, C. Koos, W. Freude, J. Leuthold, A. Barklund, R. Dinu, J. Wieland, M. Fournier, J. Fedeli, W. Bogaerts, P. Dumon, and R. Baets, "Silicon High-Speed Electro-Optic Modulator," in Proceedings of Group IV Photonics, (Academic, Beijing, China, 2010), ThC2.
5. T. Baehr-Jones, B. Penkov, J. Huang, P. Sullivan, J. Davies, J. Takayesu, J. Luo, T. D. Kim, L. Dalton, A. Jen, M. Hochberg, and A. Scherer, "Nonlinear polymer-clad silicon slot waveguide modulator with a half wave voltage of 0.25 V," Appl. Phys. Lett. 92(16), 163303 (2008).
6. G. Wang, T. Baehr-Jones, M. Hochberg, and A. Scherer, "Design and fabrication of segmented, slotted waveguides for electro-optic modulation," Appl. Phys. Lett. 91(14), 143109 (2007).
7. J. H. Wülbern, J. Hampe, A. Petrov, M. Eich, J. Luo, A. K.-Y. Jen, A. Di Falco, T. F. Krauss, and J. Bruns, "Electro-optic modulation in slotted resonant photonic crystal heterostructures," Appl. Phys. Lett. 94(24), 241107 (2009).
8. C. Koos, J. Brosi, M. Waldow, W. Freude, and J. Leuthold, "Silicon-on-insulator modulators for next-generation 100 Gbit/s-Ethernet", Proc. 33th European Conf. Opt. Commun, (Academic, Berlin, Germany, 2007), Paper P056.
9. J. Leuthold, W. Freude, J.-M. Brosi, R. Baets, P. Dumon, I. Biaggio, M. L. Scimeca, F. Diederich, B. Frank, and C. Koos, "Silicon Organic Hybrid Technology-A Platform for Practical Nonlinear Optics," Proc. IEEE 97(7), 1304-1316 (2009).
10. ePIXFab Technology Paper, "LETI-05 Flex process" (2010). http://www.epixfab.eu/uploads/media/LETI-05-technical-flex.pdf
11. R. A. Soref, and B. R. Bennett, "Electrooptical effects in silicon," IEEE J. Quantum Electron. 23(1), 123-129 (1987).
12. H. F. Okorn-Schmidt, "Characterization of silicon surface preparation processes for advanced gate dielectrics," IBM J. Res. Develop. 43(3), 351-365 (1999).
13. S. M. Sze, and K. K. Ng, Physics of Semiconductor Devices 3rd edition, (Wiley-Interscience, 2006), Chap. 3.
14. FemSIM software, RSOFT Design Inc. http://www.rsoftdesign.com/products. php?sub=Component+Design&itm=FemSIM
15. J. Luo, X.-H. Zhou, and A. K.-Y. Jen, "Rational molecular design and supramolecular assembly of highly efficient organic electro-optic materials," J. Mater. Chem. 19(40), 7410-7424 (2009).
16. R. Ding, T. Baehr-Jones, Y. Liu, R. Bojko, J. Witzens, S. Huang, J. Luo, S. Benight, P. Sullivan, J.-M. Fedeli, M. Fournier, L. Dalton, A. Jen, and M. Hochberg, "Demonstration of a low V p L modulator with GHz bandwidth based on electro-optic polymer-clad silicon slot waveguides," Opt. Express 18(15), 15618-15623 (2010).
17. S. Wolf, and R. N. Tauber, Silicon Processing for VLSI Era Volume 1 - Processing Technology 2nd edition, (Lattice Press, 2000), Chap. 8.
18. H. Ma, A. K.-Y. Jen, and L. R. Dalton, "Polymer-based optical waveguides: Materials, processing, and Devices," Adv. Mater. (Deerfield Beach Fla.) 14(19), 1339-1365 (2002).
19. MicroChem NANO™ PMMA and Copolymer datasheet. http://www.microchem. com/products/pdf/PMMA-Data-Sheet.pdf
20. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, "An out-of-plane grating coupling for efficient butt-coupling between compact planar waveguides and single-mode fibers," IEEE J. Quantum Electron. 38(7), 949-955 (2002).
21. FullWAVE software, RSOFT Design Inc. http://www.rsoftdesign.com/products. php?sub=Component+Design&itm=FullWAVE
22. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes in C: The Art of Scientific Computing 2nd edition, (Cambridge University Press, 1992), Chap. 15.
23. J. Witzens, T. Baehr-Jones, and M. Hochberg, "Design of transmission line driven slot waveguide Mach-Zehnder interferometers and application to analog optical links," Opt. Express 18(16), 16902-16928 (2010).