Thermodynamic calculation of CH3SiCl3-BCl3-H2 system vapor deposition

Fuhe Cailiao Xuebao/Acta Materiae Compositae Sinica

Volumn 27, Issue 5, 2010, Pages 55-61

  Zuo, Xinzhang ^a   Zhang, Litong ^a   Liu, Yongsheng ^a   Cheng, Laifei ^a   Zeng, Qingfeng ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

Author keywords

Chemical vapor deposition (CVD); Si B C system; Thermodynamic calculation; Yields analysis

Indexed keywords

BORON TRICHLORIDE; C-SYSTEMS; DEPOSITION TEMPERATURES; FACTSAGE; HIGH TEMPERATURE; HYDROGEN SYSTEM; LOW PRESSURES; METHYLTRICHLOROSILANE; RICH PHASE; SIC FORMATION; THERMODYNAMIC CALCULATION; THERMODYNAMIC CALCULATIONS; THERMODYNAMIC EQUILIBRIA; TOTAL PRESSURE; YIELDS ANALYSIS;

BORON; BORON COMPOUNDS; PRESSURE EFFECTS; SILICON CARBIDE; TEMPERATURE; THERMODYNAMICS;

CHEMICAL VAPOR DEPOSITION;

EID: 78649377455     PISSN: 10003851     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)

1. Zhang Litong, Cheng Laifei. Discussion on strategies of sustainable development of continuous fiber reinforced ceramic matrix composites[J]. Acta Materiae Compositae Sinica, 2007, 24(2): 1-6.
2. Naslain R. Design, preparation and properties of non-oxidation CMCs for application in engines and nuclear reactors: An overview[J]. Comp Sci Technol, 2004, 62(2): 155-170.
3. Yin Xiaowei, Cheng Laifei, Zhang Litong, et al. Microstructure and oxidation resistance of carbon/silicon carbide composites infiltrated with chromium silicide[J]. Materials Science and Engineering A, 2000, 29(1/2): 89-94.
4. Liu Yongsheng, Cheng Laifei, Zhang Litong, et al. Oxidation protection of multilayer CVD SiC/B/SiC coatings for 3D C/SiC composite[J]. Materials Science and Engineering A, 2007, 466(1/2): 172-177.
5. 2008: 25-45.
6. Liu Yongsheng, Zhang Litong, Cheng Laifei, et al. Preparation and oxidation protection of CVD SiC/a-BC/SiC coatings for 3D C/SiC composites[J]. Corrosion Science, 2009, 51(4): 820-826.
7. 4C coating in a wet oxygen environment[J]. Applied Composite Materials, 2006, 13(6): 397-406.
8. 4C, SiC, and SiBC for environmental composite protection[C]//Progress in Advanced Materials and Mechanics. Proceedings of the International Conference on Advanced Materials. Beijing: Beijing University Press, 1996: 1198-1204.
9. 1984: 12-48.
10. Goujard S, Vandenbulcke L, Bernard C. Thermodynamic study of the chemical vapour deposition in the Si-B-C-H-Cl system[J]. Calphad, 1994, 18(4): 369-385.
11. Golda E M, Gallois B. Chemical vapor deposition of multiphase boron-carbon-silicon ceramics[C]// Materials Research Society Symposium Proceedings. Boston: Materials Research Society, 1992, 250: 167-172.
12. Moss T S. The chemical vapor deposition of dispersed phase composites in the B-Si-C-H-Cl-Ar system[D]. Atlanta: Georgia Institute of Technology, 1995: 242-258.
13. 1987: 173-195.
14. 2004: 93-120.
15. Cao Zhanmin, Song Xiaoyan, Qiao Zhiyu. Thermodynamic modeling software FactSage and its application[J]. Chinese Journal of Rare Metals, 2008, 32(2): 216-219.
16. 1995: 271-275.