Wet silicon bulk micromachined THz waveguides for low-loss integrated sensor applications

IRMMW-THz 2010 - 35th International Conference on Infrared, Millimeter, and Terahertz Waves, Conference Guide

Volumn , Issue , 2010, Pages

  Matvejev, V ^a   De Tandt, C ^a   Ranson, W ^a   Stiens, J ^a  

^a VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

BULK-MICROMACHINED; CROSS-SECTION ANALYSIS; FABRICATION PROCESS; INTEGRATED SENSORS; LOW LOSS; OPERATIONAL FREQUENCY; SI BULK MICROMACHINING; THZ FREQUENCIES;

FREQUENCY BANDS; WAVEGUIDES;

TERAHERTZ WAVES;

EID: 78649367441     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIMW.2010.5612337     Document Type: Conference Paper

References (2)

1. T. Globus, D. Woolard, M. Bykhovskaia, B. Gelmont, L. Werbos, and A. Samuels, "THz-frequency spectroscopic sensing of DNA and related biological materials," Int. J. High Speed Electron. Syst., vol. 13, no. 4, pp. 903-936, 2003.
2. S. Biber, J. Schur, A. Hofmann, and L.-P. Schmidt, "Design of new passive THz devices based on micromachining techniques," The 5th Int. Kharkov Symp. on Phys. and Eng. of Microwaves, Millimeter, and Submillimeter Waves, pp. 26-31, 2004.