Combining moiré patterns and high resolution transmission electron microscopy for in-plane thin films thickness determination

Ultramicroscopy

Volumn 111, Issue 2, 2011, Pages 149-154

  Valamanesh, M ^a,b   Langlois, C ^a   Alloyeau, D ^a   Lacaze, E ^b   Ricolleau, C ^a  

^a UNIVERSITÉ PARIS DIDEROT   (France)

^b INSTITUT DES NANOSCIENCES DE PARIS   (France)

Author keywords

HRTEM; Moir pattern; Simulation; Thin films; Transmission electron microscopy

Indexed keywords

CORE-SHELL NANOPARTICLES; CRYSTALLOGRAPHIC ORIENTATIONS; DYNAMICAL THEORY; EXPERIMENTAL CONDITIONS; HRTEM; HRTEM IMAGES; IN-PLANE; IN-PLANE SAMPLE; LATTICE FRINGES; LATTICE SPACING; LINEAR BEHAVIOR; MULTI-BEAM; SAMPLE THICKNESS; SIMULATION; TEM; THICKNESS RATIO; THIN FILMS-THICKNESS; TRANSMISSION ELECTRON; TWO BEAMS;

CRYSTALS; ELECTRON MICROSCOPY; SILVER; THIN FILMS;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

COPPER; SILVER NANOPARTICLE;

ACCURACY; ANALYTICAL ERROR; ARTICLE; CONCEPTUAL FRAMEWORK; CONTROLLED STUDY; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; FILM; IMAGE ANALYSIS; MATHEMATICAL COMPUTING; MATHEMATICAL MODEL; PROCESS DEVELOPMENT; PROCESS MODEL; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY; VALIDATION PROCESS;

CRYSTALLOGRAPHY; IMAGE PROCESSING, COMPUTER-ASSISTED; MICROSCOPY, ELECTRON, TRANSMISSION; MOIRE TOPOGRAPHY; NANOPARTICLES;

EID: 78649325910     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2010.10.017     Document Type: Article

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