Design and simulation of two Z-axis microgyroscopes with different types of decoupled structures

2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Volumn , Issue , 2010, Pages 66-69

  Yan, Xin ^a   Che, Lingjuan ^a,b   Chen, Xuyuan ^a,b  

^a XIAMEN UNIVERSITY   (China)

^b UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

Author keywords

Decoupling of systems; Gyroscopes; MEMS

Indexed keywords

ANSYS SOFTWARE; DECOUPLED STRUCTURES; DECOUPLING OF SYSTEMS; DESIGN AND SIMULATION; DRIVE MODE; ERROR EFFECT; FRAME STRUCTURE; MICROGYROSCOPES; NOISE LEVELS; PERFORMANCE COMPARISON; PROOF MASS; SENSE MODE;

CROSSTALK;

GYROSCOPES;

EID: 78649239442     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2010.5592144     Document Type: Conference Paper

References (12)

1. P. Greiff, B. Boxenhorn, T. King, and L. Niles, "Silicon monolithic micromechanical gyroscope," in Tech. Dig. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers'91), 1991, pp. 966-968.
2. F. Ayazi, M. F. Zaman, A. Sharma, "Vibrating Gyroscopes," In: Comprehensive Microsystems, Elsevier, Oxford, 2008, pp. 181-208.
3. W. Geiger, W. U. Butt, A. Gaißer, J. Frech, M. Braxmaier, T. Link, A. Kohne, P. Nommensen, H. Sandmaier, W. Lang and H. Sandmaier, "Decoupled microgyroscopes and the design principle DAVED," Sensors and Actuators A, Vol 95, pp. 239-249, 2002.
4. Y. Mochida, M. Tamura, and K. Ohwada, "Gyroscope with Independent Beams for Drive and Detection Modes," Sensors and Actuators A, Vol. 80, pp. 170-178, 2000.
5. J.A. Geen, "A Path to Low Cost Gyroscopy," Solid-State Sensor and Actuator Workshop, Hilton-Head, SJ, 1998, pp. 51-54.
6. W. Geiger, W.U. Butt, A. Gaisser, J. Fretch, M. Braxmaier, T. Link, A. Kohne,P. Nommensen, H. Sandmaier, and W. Lang, "Decoupled Microgyroscopes and the Design Principle DAVED," IEEE Sensors Journal, pp. 170-173, 2001.
7. S.E. Alper; K. Azgin; T. Akin, "High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes, " Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on , 2006, pp.70-73.
8. S. E. Alper, Y. Temiz, T.Akin, "A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope," Journal of Microelectromechanical Systems, vol.17, pp. 1418-1429, 2008.
9. X. S. Liu, Z. C. Yang, X. Z. Chi, J. Cui, H. T. Ding, Z. Y. Quo, B. Lv, G. Z. Yan, "An x-axis micromachined gyroscope with doubly decoupled oscillation modes," Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on, 2008, pp. 860-863.
10. X. Yan, Z. C. Ma, X. Y. Chen, "Design and Simulation of a Z-axis Dual Proof Mass Micromachined Gyroscope with Decoupled Oscillation Modes," Advanced Materials Research, Vol 60-61, pp. 298-302, 2009.
11. W. A. Clark, R. T. Howe, R. Horowitz, "Surface Micromachined Z-Axis Vibratory Rate Gyroscope," Digest of Solid-State Sensors and Actuator Workshop, pp 283-287, 1996
12. T. Gabrielson, "Mechanical-thermal noise in micromachined acoustic and vibration sensors," Electron Devices IEEE Transactions, Vol 40, pp. 903-909, 1993.