PZT piezoelectric films on glass for Gen-X imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7803, Issue , 2010, Pages

  Wilke, Rudeger H T ^a   Trolier Mckinstry, Susan ^a   Reid, Paul B ^b   Schwartz, Daniel A ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

glass substrates; low temperature crystallization; piezoelectric; PZT thin films; sol gel processing; sputter deposition

Indexed keywords

GLASS SUBSTRATES; LOW-TEMPERATURE CRYSTALLIZATION; PIEZOELECTRIC; PZT THIN FILM; SOL-GEL PROCESSING;

CRYSTALLIZATION; DEPOSITION; FURNACES; GELS; GLASS; GLASS TRANSITION; HYSTERESIS; HYSTERESIS LOOPS; ISOTHERMAL ANNEALING; MAGNETRONS; PERMITTIVITY; PEROVSKITE; PIEZOELECTRICITY; PYROLYSIS; RAPID THERMAL ANNEALING; RAPID THERMAL PROCESSING; SOL-GEL PROCESS; SOL-GELS; SOLS; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); THICK FILMS; THIN FILMS; VAPOR DEPOSITION;

SUBSTRATES;

EID: 78549295855     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.862233     Document Type: Conference Paper

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