Maglev linear actuator for nanopositioning

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 377-381

  Kim, Won Jong ^a   Maheshwari, Himanshu ^a   Gu, Jie ^a  

^a Texas AandM University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC LEVITATION; MANUFACTURE; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; VISUAL COMMUNICATION;

ATOMIC LEVELS; CLOSED-LOOP CONTROL; EMERGING TECHNOLOGIES; KEY ELEMENTS; LINEAR ACTUATOR; MICRO PART; MOVING PARTS; NANO-POSITIONING; NANOSCALE STRUCTURE; POSITIONING DEVICES; RANGE OF MOTIONS; TELEPRESENCE; VIBRATION ISOLATIONS;

ACTUATORS;

EID: 78249240636     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33395     Document Type: Conference Paper

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