Design and characterization of a MEMS piezoresistive cochlear-like acoustic sensor

ASME International Mechanical Engineering Congress and Exposition, Proceedings

Volumn , Issue , 2002, Pages 201-210

  White, Robert D ^a   Grosh, Karl ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAGES; MAMMALS; MECHANICAL ENGINEERING; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SIGNAL PROCESSING; SIGNAL TRANSDUCTION; SILICON WAFERS;

ACOUSTIC SENSORS; ACOUSTIC TRANSDUCTION; BEAM CENTERS; DEVICE SENSITIVITY; ELECTRICAL MODELS; FREQUENCY INFORMATION; FREQUENCY-SENSITIVE; MAMMALIAN COCHLEA; MECHANICAL MEASUREMENTS; MECHANICAL SIGNALS; MICROMACHINED ARRAYS; OPERATING MODES; PIEZO-RESISTIVE; PIEZORESISTOR; REAL TIME; RESPONSE AMPLITUDES; SILICON BEAMS; STRAIN GAUGE; VELOCITY RESPONSE;

FREQUENCY RESPONSE;

EID: 78249232368     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2002-33309     Document Type: Conference Paper

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