Impact of the gas-surface scattering and gas molecule-molecule interaction on the mass flow rate of the rarefied gas through a short channel into a vacuum

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 6, 2010, Pages 1393-1398

  Sazhin, O ^a  

^a URAL FEDERAL UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

FLOW OF GASES; MASS TRANSFER; MOLECULES; MONTE CARLO METHODS; PLASMA INTERACTIONS; SURFACE SCATTERING;

DIRECT SIMULATION MONTE CARLO METHOD; GAS MOLECULES; GAS-SURFACE SCATTERING; HEIGHT RATIO; MASS FLOW RATE; RAREFIED GAS; RAREFIED GAS FLOW; SHORT CHANNELS;

GASES;

EID: 78149427261     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3504596     Document Type: Article

References (30)

1. Encyclopedia of Microfluidics and Nanofluidics, edited by, D. Li, (Springer, New York, 2008)., 10.1007/978-0-387-48998-8
2. G. Karniadakis, A. Beskok, and N. Aluru, Microflows and Nanoflows: Fundamentals and Simulation (Springer, NY, 2005).
3. M. Hakak Khadem, M. Shams, and S. Hossainpour, Int. J. Aero Mech. Eng. 3, 211 (2009).
4. O. V. Sazhin, S. F. Borisov, and F. Sharipov, J. Vac. Sci. Technol. A JVTAD6 0734-2101 19, 2499 (2001) 10.1116/1.1388622; O. V. Sazhin, S. F. Borisov, and F. Sharipov, J. Vac. Sci. Technol. A JVTAD6 0734-2101 20, 957 (E) (2002). 10.1116/1.1459081
5. Erratum: Accommodation coefficient of tangential momentum on atomically clean and contaminated surfaces (J. Vac. Sci. Technol. A (2001) 19 (2499))
6. O. V. Sazhin and S. F. Borisov, J. Eng. Phys. Thermophys. JEPTER 1062-0125 74, 1232 (2001). 10.1023/A:1012992503424
7. B. T. Porodnov, P. E. Suetin, S. F. Borisov, and V. D. Akinshin, J. Fluid Mech. JFLSA7 0022-1120 64, 417 (1974). 10.1017/S0022112074002485
8. B. T. Porodnov, P. E. Suetin, S. F. Borisov, and V. D. Akinshin, J. Fluid Mech. JFLSA7 0022-1120 64, 417 (1974). 10.1017/S0022112074002485
9. F. Sharipov, Eur. J. Mech. B/Fluids EJBFEV 0997-7546 21, 113 (2002). 10.1016/S0997-7546(01)01160-8
10. F. Sharipov, Eur. J. Mech. B/Fluids EJBFEV 0997-7546 22, 145 (2003). 10.1016/S0997-7546(03)00018-9
11. Bing-Yang Cao, Jun Sun, Min Chen, and Zeng-Yuan Guo, Int. J. Mol. Sci. IJMCFK 1422-0067 10, 4638 (2009). 10.3390/ijms10114638
12. A. Agrawal and S. V. Prabhu, J. Vac. Sci. Technol. A JVTAD6 0734-2101 26, 634 (2008). 10.1116/1.2943641
13. A. D. Chew, J. Vac. Sci. Technol. A JVTAD6 0734-2101 27, 591 (2009). 10.1116/1.3106613
14. Errol B. Arkilic, Kenneth S. Breuer, and Martin A. Schmidt, J. Fluid Mech. JFLSA7 0022-1120 437, 29 (2001). 10.1017/S0022112001004128
15. F. Sharipov and G. Bertoldo, Phys. Fluids PHFLE6 1070-6631 21, 067101 (2009). 10.1063/1.3156011
16. O. Sazhin, J. Exp. Theor. Phys. JTPHES 1063-7761 109, 700 (2009). 10.1134/S1063776109100161
17. M. S. Ivanov and S. V. Rogazinskiy, Zh. Vychisl. Mat. Mat. Fiz. ZVMFAN 0044-4669 28, 1058 (1988) (in Russian).
18. M. S. Ivanov and S. V. Rogazinskiy, Zh. Vychisl. Mat. Mat. Fiz. ZVMFAN 0044-4669 28, 1058 (1988) (in Russian).
19. C. Cercignani and M. Lampis, Transp. Theory Stat. Phys. TTSPB4 0041-1450 1, 101 (1971). 10.1080/00411457108231440
20. C. Cercignani and M. Lampis, Transp. Theory Stat. Phys. TTSPB4 0041-1450 1, 101 (1971). 10.1080/00411457108231440
21. M. Epstein, AIAA J. AIAJAH 0001-1452 5, 1797 (1967). 10.2514/3.4307
22. O. Sazhin, A. Kulev, S. Borisov, and S. Gimelshein, Vacuum VACUAV 0042-207X 8, 20 (2008).
23. S. -S. Hsieh, H. -H. Tsai, C. -Y. Lin, C. -F. Huang, and C. -M. Chien, Int. J. Heat Mass Transfer IJHMAK 0017-9310 47, 3877 (2004). 10.1016/j.ijheatmasstransfer.2004.03.027
24. J. S. Jang, Y. B. Zhao, and S. T. Wereley, MEMS-03: IEEE The Sixteenth Annual International Conference on Micro Electro Mechanical Systems (IEEE, Kyoto, 2003), pp. 287-290.
25. N. Selden, N. Gimelshein, S. Gimelshein, and A. Ketsdever, Phys. Fluids PHFLE6 1070-6631 21, 073101 (2009). 10.1063/1.3187932
26. R. G. Lord, Phys. Fluids A PFADEB 0899-8213 3, 706 (1991). 10.1063/1.858076
27. O. Sazhin, J. Exp. Theor. Phys. JTPHES 1063-7761 108, 874 (2009). 10.1134/S1063776109050161
28. O. Sazhin, J. Exp. Theor. Phys. JTPHES 1063-7761 108, 874 (2009). 10.1134/S1063776109050161
29. K. Koura and H. Matsumoto, Phys. Fluids A PFADEB 0899-8213 3, 2459 (1991). 10.1063/1.858184
30. B. T. Porodnov, P. E. Suetin, and S. F. Borisov, Zh. Tekh. Fiz. ZTEFA3 0044-4642 40, 2383 (1970) (in Russian).