Aperiodic Fourier modal method in contrast-field formulation for simulation of scattering from finite structures

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 27, Issue 11, 2010, Pages 2423-2431

  Pisarenco, Maxim ^a   Maubach, Joseph ^a   Setija, Irwan ^b   Mattheij, Robert ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

LASER RESONATORS; MODAL ANALYSIS; NUMERICAL METHODS;

ARBITRARY ANGLES; COMPUTATIONAL DOMAINS; CONTRAST-FIELD FORMULATIONS; FINITE STRUCTURES; FOURIER MODAL METHOD; GOVERNING EQUATIONS; HOMOGENEOUS SYSTEM; NON-HOMOGENEOUS; PERFECTLY MATCHED LAYER; PLANAR SCATTERING; PLANE WAVE; SECOND-ORDER ORDINARY DIFFERENTIAL EQUATIONS; TE-POLARIZED LIGHT;

ORDINARY DIFFERENTIAL EQUATIONS;

EID: 78149288381     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.27.002423     Document Type: Article

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