SCOPUS 정보 검색 플랫폼

Volumn 19, Issue 9, 2010, Pages

Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 μm PZT thick films: Batch scale fabrication and integration with MEMS

(3) Wilson, S A a Jourdain, R P a Owens, S a

a CRANFIELD UNIVERSITY (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ANCILLARY SYSTEM; BENDING ACTUATORS; BI-DIRECTIONAL; BONDING TECHNIQUES; FABRICATION ROUTES; FORCE-DISPLACEMENT; HIGH-VOLTAGES; MICRO PUMP; MICRO VALVES; PIEZOELECTRIC BIMORPHS; PRE-STRESSED; PRODUCTION LEVEL; PZT; PZT THICK FILMS; ULTRA PRECISION;

BONDING; ELECTROMECHANICAL DEVICES; MICROACTUATORS; PIEZOELECTRIC CERAMICS; PIEZOELECTRICITY; PUMPS; THICK FILMS; WAFER BONDING;

PIEZOELECTRIC ACTUATORS;

EID: 78149239654 PISSN: 09641726 EISSN: 1361665X Source Type: Journal
DOI: 10.1088/0964-1726/19/9/094001 Document Type: Article

Times cited : (5)

References (8)

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