Long carrier lifetime in 4H-SiC epilayers using chlorinated precursors

Materials Science Forum

Volumn 615 617, Issue , 2009, Pages 291-294

  Shrivastava, A ^a   Klein, P B ^b   Glaser, E R ^b   Caldwell, J D ^b   Bolotnikov, A V ^a   Sudarshan, T S ^a  

^a The Department of Mechanical Engineering   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

4H SiC; Carrier lifetime; Dichlorosilane; Epilayers; Photoluminescence (PL); Silane

Indexed keywords

EPILAYERS; GRAPHITE; PHOTOLUMINESCENCE; SEMICONDUCTOR QUANTUM WELLS; SILANES; SILICON CARBIDE;

4H-SIC; DICHLOROSILANES; EPILAYERS GROWN; MINORITY CARRIER LIFETIMES; OPTIMAL COMBINATION; SIC EPILAYERS; SUSCEPTORS; TIME-RESOLVED PHOTOLUMINESCENCE;

CARRIER LIFETIME;

EID: 78049396864     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.615-617.291     Document Type: Conference Paper

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