New optical 3D-CD metrology techniques for liquid crystal display manufacture inspection and process control

AD'07 - Proceedings of Asia Display 2007

Volumn 1, Issue , 2007, Pages 959-963

  He, Zhan ^a   Zheng, Jeff ^a   Garden, Ron ^a   De Groot, Peter ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

3D CD metrology; Flat planel display; Process control; White light interferometry

Indexed keywords

CD-METROLOGY; DIMENSIONAL METROLOGY; FLAT PLANEL DISPLAY; HIGH-SPEED; PRODUCTION LINE; REPRODUCIBILITIES; SURFACE PROFILING; WHITE-LIGHT INTERFEROMETRY;

INTERFEROMETRY; LIQUID CRYSTAL DISPLAYS; LIQUID CRYSTALS; MANUFACTURE; THREE DIMENSIONAL;

PROCESS CONTROL;

EID: 77958058103     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. M. Davidson, K. Kaufman and I. Mazor, Solid State Technology, 57 (1987).
2. P. de Groot, US Patent No. 5, 398, 113 (March 14, 1995).
3. P.A. Flournoy, R. W. McClure, and G. Wyntjes, Appl. Opt. 11, 1907-1915 (1972).
4. P de Groot, US Patent Application 20050078318 (published 4/14/2005).
5. P. de Groot, US Patent 7, 068, 376 (6/27/2006).