Investigations of thermal annealing effects on electrical and structural properties of SrTaO based MIM capacitor

Microelectronic Engineering

Volumn 87, Issue 12, 2010, Pages 2561-2564

  Kaynak, C Baristiran ^a   Lukosius, M ^a   Costina, I ^a   Tillack, B ^a,b   Wenger, Ch ^a   Ruhl, G ^c   Rushworth, S ^d  

^a HP   (Germany)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c Infineon   (Germany)

^d SAFC Hitech   (United Kingdom)

Author keywords

Annealing; High k; MIM

Indexed keywords

ANNEALING; DIELECTRIC MATERIALS; ELECTRODES; HIGH-K DIELECTRIC; METAL ANALYSIS; METAL INSULATOR BOUNDARIES; STRUCTURAL PROPERTIES;

ANNEALING EFFECTS; ANNEALING TEMPERATURES; ELECTRICAL AND STRUCTURAL PROPERTIES; ELECTRODE MATERIAL; HIGH- K; METAL INSULATOR METAL CAPACITOR (MIM); ORDERS OF MAGNITUDE; THERMAL ANNEALING EFFECTS;

MIM DEVICES;

EID: 77958049391     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.07.015     Document Type: Article

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