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Volumn 48, Issue 5, 2010, Pages 502-508

Regrowth of ZnO thin film with high surface flatness and enhanced optical properties on annealed buffer layers by rf sputtering deposition

(2) Liu, Chunli a Morko, Hadis b

a Hankuk University of Foreign Studies (South Korea)

b Virginia Commonwealth University (United States)

Author keywords

Annealing; Buffer layer; Photoluminescence; Rf sputtering; Surface flatness; ZnO

Indexed keywords

ANNEALED LAYERS; ANNEALING PROCESS; CRYSTALLINITIES; DEPOSITION CONDITIONS; HIGH QUALITY; POSTGROWTH ANNEALING; RF SPUTTERING DEPOSITION; RF-SPUTTERING; SAPPHIRE SUBSTRATES; SURFACE FLATNESS; ZNO; ZNO LAYERS; ZNO THIN FILM;

ANNEALING; BUFFER LAYERS; CRYSTAL ORIENTATION; DEPOSITION; EPITAXIAL LAYERS; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; OPTICAL WAVEGUIDES; PHOTOLUMINESCENCE; VAPOR DEPOSITION; ZINC OXIDE;

SURFACE MORPHOLOGY;

EID: 77957962845 PISSN: 07496036 EISSN: 10963677 Source Type: Journal
DOI: 10.1016/j.spmi.2010.09.002 Document Type: Article

Times cited : (7)

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