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Volumn 49, Issue 8 PART 1, 2010, Pages
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Properties of InGaN films grown by reactive sputtering
a
SAGA UNIVERSITY
(Japan)
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Author keywords
[No Author keywords available]
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Indexed keywords
AREA RATIOS;
ARSENIC ATOM;
BAND GAP ENERGY;
DIFFRACTION PEAKS;
DIRECT BAND GAP;
GAAS WAFER;
INGANAS;
LOW SUBSTRATE TEMPERATURE;
OPTICAL ANALYSIS;
SAPPHIRE SUBSTRATES;
SUBSTRATE TEMPERATURE;
VEGARD'S LAW;
ARSENIC;
DESORPTION;
DIFFRACTION;
ENERGY GAP;
GALLIUM ARSENIDE;
GALLIUM NITRIDE;
INDIUM;
NITROGEN PLASMA;
SEMICONDUCTING GALLIUM;
SUBSTRATES;
X RAY DIFFRACTION;
X RAY DIFFRACTION ANALYSIS;
GALLIUM ALLOYS;
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EID: 77957867266
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.49.081203 Document Type: Article |
Times cited : (15)
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References (26)
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