MEMS indium FEEP thruster: Manufacturing study and first prototype results

40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit

Volumn , Issue , 2004, Pages

  Tajmar, M ^a  

^a ARC SEIBERSDORF RESEARCH GMBH   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

COLLOID THRUSTERS; EMITTER ELECTRODES; FIELD-EMISSIONS; MANUFACTURING TECHNIQUES; MICRO EDM; PROTOTYPE TESTING; SILICON ETCHING; SILICON-BASED EMITTERS; THRUST LEVELS;

MANUFACTURE; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MINIATURE INSTRUMENTS; PROPULSION; SCALES (WEIGHING INSTRUMENTS);

INDIUM;

EID: 77957839995     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Tajmar, M., Genovese, A., and Steiger, W., "Indium FEEP Microthruster Experimental Characterization", AIAA Journal of Propulsion and Power, Vol. 20, No. 2, 2004, pp. 211-218
2. M. Paine and S. Gabriel, "A Micro-Fabricated Colloidal Thruster Array", AIAA Paper 2001-3329, 2001
3. L. Velasquez Garcia and M. Martinez-Sanchez, "A Microfabricated Colloid Thruster Array", AIAA Paper 2002-3810, 2002
4. J. Stark, M. Paine, B. Kent, B. Stevens and M. Sandford, M. Alexander, "Colloid Propulsion - A Re-evaluation with an Integrated Design", AIAA Paper 2003-4851, 2003
5. J. Stark, B. Stevens, M. Alexander, "Fabrication and Operation of Micro-fabricated colloid Thruster Arrays", AIAA Paper 2003-4852, 2003
6. Tajmar, M., and Semerad, E., "Skalierbare Indium Flüssigmetall Ionenquelle", Austrian Patent Application, A 1932/2002, 2002 (PCT/AT03/00370)
7. Tajmar, M., Genovese, A., Buldrini, N., and Steiger, W., "Miniaturized Indium-FEEP Multiemitter Design and Performance", AIAA Paper 2002-5718, 2002
8. Spindt, C.A., "Microfabricated Field-Emission and Field-Ionization Sources", Surface Science, 266, 1992, pp. 145-154
9. Spindt, C.A., "Microelectronic Field Ionizer and Method of Fabricating the Same", US Patent 4926056, 1990
10. Mitterauer, J., "Miniaturized Liquid Metal Ion Sources (MILMIS)", Surface Science, 246, 1991, pp. 107-112
11. Marcuccio, S., Lorenzi, G., and Andrenucci, A., "Development of a Miniaturized Field Emission Propulsion System", AIAA Paper 98-3919,1998
12. Tajmar, M., "Indium Capillary Liquid-Metal-Ion-Source Operation in the Flow Resistance Regime", Journal of Physics D: Applied Physics, submitted (2004)