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Volumn 46, Issue 3, 2010, Pages 280-284
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Compact sensor for environmental monitoring
a
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Author keywords
[No Author keywords available]
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Indexed keywords
A PLANTS;
ATMOSPHERIC CONTAMINANTS;
CONTAMINATION SENSOR;
CONTAMINATION SOURCES;
DETECTING TRACE;
DETECTION SYSTEM;
ENVIRONMENTAL MEASUREMENTS;
ENVIRONMENTAL MONITORING;
FABRICATION PROCESS;
GASEOUS SUBSTANCES;
GASPHASE;
HIGH SENSITIVITY;
LSI FABRICATION;
NOTE-BOOK COMPUTER;
PRODUCT QUALITY;
PRODUCTION COST;
SEMICONDUCTOR FABRICATION PLANT;
SENSOR SYSTEMS;
TIME VARYING;
UNIVERSAL SERIAL BUS;
CONTAMINATION;
FABRICATION;
IMPURITIES;
LAPTOP COMPUTERS;
POLLUTION DETECTION;
QUARTZ;
SILICON WAFERS;
QUARTZ CRYSTAL MICROBALANCES;
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EID: 77957830698
PISSN: 00162523
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (1)
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References (3)
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