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Volumn 81, Issue 9, 2010, Pages
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Fabry-Ṕrot interferometer utilized for displacement measurement in a large measuring range
a b c |
Author keywords
[No Author keywords available]
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Indexed keywords
COMPARISON MEASUREMENT;
DISPLACEMENT MEASUREMENTS;
ENVIRONMENT EFFECTS;
MEASUREMENT SYSTEM;
MEASURING RANGES;
OPTICAL CONFIGURATIONS;
REFERENCE STANDARD;
SUBMICROMETERS;
TILT ANGLE;
INTERFEROMETERS;
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EID: 77957716773
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3480551 Document Type: Article |
Times cited : (8)
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References (7)
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