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Volumn 94, Issue 12, 2010, Pages 2314-2317

Electroless deposition of Ag nanoparticles on the surface of SiN x:H dielectric layers

Author keywords

Electroless metal deposition; Hydrogenated silicon nitride; Metal nanoparticles; Silicon nanoparticles

Indexed keywords

AG NANOPARTICLE; DIELECTRIC LAYER; DIFFERENT SIZES; ELECTROLESS DEPOSITION; ELECTROLESS METAL DEPOSITION; HYDROGENATED SILICON; METAL NANOPARTICLES; ROOM TEMPERATURE; SILICON NANOPARTICLES; TIME-SCALES;

EID: 77957689071     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.07.031     Document Type: Article
Times cited : (14)

References (15)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.