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Volumn 19, Issue 11, 2010, Pages 1405-1410

High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electro-discharge machining

(7) Khalid, Waqas a Ali, Mohamed Sultan Mohamed a Dahmardeh, Masoud a Choi, Yongho a Yaghoobi, Parham a Nojeh, Alireza a Takahata, Kenichi a

a UNIVERSITY OF BRITISH COLUMBIA (Canada)

Author keywords

Carbon nanotube forests; Chemical vapor deposition; Free form micromachining; High aspect ratio microstructures; Micro electro discharge machining; Micro electro mechanical systems

Indexed keywords

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRIC DISCHARGES; ENERGY DISPERSIVE SPECTROSCOPY; FORESTRY; MEMS; MICROMACHINING; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SURFACE ANALYSIS; YARN;

FREEFORMS; HIGH ASPECT RATIO MICROSTRUCTURES; MICRO ELECTRO MECHANICAL SYSTEM; MICRO ELECTRO-DISCHARGE MACHINING; NANOTUBE FORESTS;

ASPECT RATIO;

EID: 77957370746 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2010.08.007 Document Type: Article

Times cited : (48)

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