Texture evolution of vertically aligned biaxial tungsten nanorods using RHEED surface pole figure technique

Nanotechnology

Volumn 21, Issue 32, 2010, Pages

  Krishnan, R ^a   Liu, Y ^b   Gaire, C ^b   Chen, L ^b   Wang, G C ^b   Lu, T M ^b  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b Research Rensselaer Polytechnic Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANOMALOUS BEHAVIOR; BIAXIAL TEXTURES; CRYSTALLOGRAPHIC DIRECTIONS; DC MAGNETRON SPUTTERING; GLANCING ANGLE; IN-PLANE; IN-PLANE TEXTURE; INCIDENT FLUX; NATIVE OXIDES; OUT-OF-PLANE; POLE FIGURE; POLYCRYSTALLINE FILM; ROOM TEMPERATURE; SI (100) SUBSTRATE; SUBSTRATE ROTATION; SURFACE POLE FIGURE; TEXTURE EVOLUTIONS; VERTICALLY ALIGNED;

CRYSTAL STRUCTURE; NANORODS; POLES; ROTATION; TEXTURES; TUNGSTEN;

SUBSTRATES;

EID: 77957314315     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/32/325704     Document Type: Article

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