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Volumn 150, Issue 1, 2010, Pages 99-104

Synthesizing SnO2 thin films and characterizing sensing performances

Author keywords

Electric property; Gas sensor; Pulsed laser deposition; SnO2; Thin film

Indexed keywords

AIR ATMOSPHERE; COLUMNAR GRAIN; FILM PROPERTIES; GAS SENSOR; GRAIN SIZE; HALL COEFFICIENT; PULSED LASER; ROOM TEMPERATURE; RUTILE-TYPE STRUCTURES; SENSING MECHANISM; SENSING PERFORMANCE; SENSOR PERFORMANCE; SILICA GLASS SUBSTRATE; SNO2; SPACE CHARGES; THIN-FILM GAS SENSORS;

EID: 77957277796     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2010.07.036     Document Type: Article
Times cited : (43)

References (27)
  • 1
    • 33947477650 scopus 로고
    • A new detector for gaseous components using semiconductive thin films
    • T. Seiyama, A. Kato, K. Fujishima, and N. Nagatani A new detector for gaseous components using semiconductive thin films Anal. Chem. 34 1962 1502 1503
    • (1962) Anal. Chem. , vol.34 , pp. 1502-1503
    • Seiyama, T.1    Kato, A.2    Fujishima, K.3    Nagatani, N.4
  • 3
    • 0035876236 scopus 로고    scopus 로고
    • Gas sensing properties of nanosized tin oxide synthesised by mechanochemical processing
    • L.M. Cukrov, P.G. McCormick, K. Galatsis, and W. Wlodarski Gas sensing properties of nanosized tin oxide synthesised by mechanochemical processing Sens. Actuators B 77 2001 491 495
    • (2001) Sens. Actuators B , vol.77 , pp. 491-495
    • Cukrov, L.M.1    McCormick, P.G.2    Galatsis, K.3    Wlodarski, W.4
  • 5
    • 37549056567 scopus 로고    scopus 로고
    • Theory of power laws for semiconductor gas sensors
    • N. Yamazoe, and K. Shimanoe Theory of power laws for semiconductor gas sensors Sens. Actuators B 128 2008 566 573
    • (2008) Sens. Actuators B , vol.128 , pp. 566-573
    • Yamazoe, N.1    Shimanoe, K.2
  • 6
    • 36449005374 scopus 로고
    • Study on the sensing mechanism of thin oxide flammable-gas sensors using the Hall-effect
    • M. Ippommatsu, H. Ohnishi, H. Sasaki, and T. Matsumoto Study on the sensing mechanism of thin oxide flammable-gas sensors using the Hall-effect J. Appl. Phys. 69 1991 8368 8374
    • (1991) J. Appl. Phys. , vol.69 , pp. 8368-8374
    • Ippommatsu, M.1    Ohnishi, H.2    Sasaki, H.3    Matsumoto, T.4
  • 7
    • 0025384191 scopus 로고
    • Electrical-properties of grain-boundaries in polycrystalline compound semiconductors
    • F. Greuter, and G. Blatter Electrical-properties of grain-boundaries in polycrystalline compound semiconductors Semicond. Sci. Technol. 5 1990 111 137
    • (1990) Semicond. Sci. Technol. , vol.5 , pp. 111-137
    • Greuter, F.1    Blatter, G.2
  • 8
    • 0032679469 scopus 로고    scopus 로고
    • Electric properties of zinc oxide epitaxial films grown by ion-beam sputtering with oxygen-radical irradiation
    • T. Tsurumi, S. Nishizawa, N. Ohashi, and T. Ohgaki Electric properties of zinc oxide epitaxial films grown by ion-beam sputtering with oxygen-radical irradiation Jpn. J. Appl. Phys. 38 1999 3682 3688
    • (1999) Jpn. J. Appl. Phys. , vol.38 , pp. 3682-3688
    • Tsurumi, T.1    Nishizawa, S.2    Ohashi, N.3    Ohgaki, T.4
  • 9
    • 0037092627 scopus 로고    scopus 로고
    • The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor
    • J.F. Chang, H.H. Kuo, I.C. Leu, and M.H. Hon The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor Sens. Actuators B 84 2002 258 264
    • (2002) Sens. Actuators B , vol.84 , pp. 258-264
    • Chang, J.F.1    Kuo, H.H.2    Leu, I.C.3    Hon, M.H.4
  • 10
    • 63749111316 scopus 로고    scopus 로고
    • New perspectives of gas sensor technology
    • N. Yamazoe, and K. Shimanoe New perspectives of gas sensor technology Sens. Actuators B 138 2009 100 107
    • (2009) Sens. Actuators B , vol.138 , pp. 100-107
    • Yamazoe, N.1    Shimanoe, K.2
  • 15
    • 0026850181 scopus 로고
    • 2 sensors based on tin oxide thin films, grown by means of the r.f. magnetron sputtering technique
    • 2 sensors based on tin oxide thin films, grown by means of the r.f. magnetron sputtering technique Sens. Actuators B 8 1992 79 88
    • (1992) Sens. Actuators B , vol.8 , pp. 79-88
    • Sberveglieri, G.1    Faglia, G.2    Groppelli, S.3    Nelli, P.4
  • 19
    • 0016544293 scopus 로고
    • Chemical vapor-deposition of transparent, electrically conductive tin oxide-films formed from dibutyl tin diaceate
    • J. Kane, H.P. Schweizer, and W. Kern Chemical vapor-deposition of transparent, electrically conductive tin oxide-films formed from dibutyl tin diaceate J. Electrocem. Soc. 122 1975 1144 1149
    • (1975) J. Electrocem. Soc. , vol.122 , pp. 1144-1149
    • Kane, J.1    Schweizer, H.P.2    Kern, W.3
  • 21
    • 0005799019 scopus 로고
    • High gas sensitivity of tin oxide ultrathin films deposited on glasses and alumina substrates
    • T. Suzuki, T. Yamazaki, K. Hayashi, and T. Noma High gas sensitivity of tin oxide ultrathin films deposited on glasses and alumina substrates J. Mater. Sci. 26 1991 6419 6422
    • (1991) J. Mater. Sci. , vol.26 , pp. 6419-6422
    • Suzuki, T.1    Yamazaki, T.2    Hayashi, K.3    Noma, T.4
  • 22
    • 57649218703 scopus 로고    scopus 로고
    • Epitaxial ZnO thin films for the application of ethanol gas sensor: Thickness and Al-doping effects
    • S.K. Kim, and J.Y. Son Epitaxial ZnO thin films for the application of ethanol gas sensor: thickness and Al-doping effects Electrochem. Solid-State Lett. 12 2009 J17 J19
    • (2009) Electrochem. Solid-State Lett. , vol.12
    • Kim, S.K.1    Son, J.Y.2
  • 23
    • 0035876031 scopus 로고    scopus 로고
    • 2 thin-film gas sensors fabricated by using dual ion beam sputtering
    • 2 thin-film gas sensors fabricated by using dual ion beam sputtering Sens. Actuators B 77 2001 200 2008
    • (2001) Sens. Actuators B , vol.77 , pp. 200-2008
    • Choe, Y.S.1
  • 27
    • 17644400525 scopus 로고    scopus 로고
    • Reactively sputtered titania films as high temperature carbon monoxide sensors
    • P.K. Dutta, M. Frank, G.W. Hunter, and M. George Reactively sputtered titania films as high temperature carbon monoxide sensors Sens. Actuators B 106 2005 810 815
    • (2005) Sens. Actuators B , vol.106 , pp. 810-815
    • Dutta, P.K.1    Frank, M.2    Hunter, G.W.3    George, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.