Simplified portable 4 MHz RF plasma demonstration unit

Journal of Physics: Conference Series

Volumn 182, Issue 1, 2009, Pages

  Tudoran, Cristian D ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT OF ISOTOPIC AND MOLECULAR TECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFIERS (ELECTRONIC); ATMOSPHERIC PRESSURE; PLASMA THEORY; POWER MOSFET; WAVE PLASMA INTERACTIONS;

DEMONSTRATION UNITS; ELEGANT DESIGNS; HIGH FREQUENCY PLASMA; HIGH-FREQUENCY DISCHARGES; PAPER DOCUMENTS; RF PLASMA; RF-POWER; SWITCHING AMPLIFIERS;

ELECTRIC DISCHARGES;

EID: 77957156129     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/182/1/012034     Document Type: Conference Paper

References (4)

1. Stoffels E, Flikweert A J, Stoffels W W and Kroesen G M W 2002 Plasma Sources Sci. Technol. 11 383
2. Leveille V and Coulombe S 2005 Plasma Sources Sci.Tehnol. 11 467
3. Anghel S D and Simon A 2007 Plasma Sources Sci. Tehnol. submitted
4. Denicolai M 2002 Rev. Sci. Instrum. 73 3332