Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates

Optics Express

Volumn 18, Issue 19, 2010, Pages 20086-20095

  Ghaffari, Afshin ^a   Hosseini, Amir ^a   Xu, Xiaochuan ^a   Kwong, David ^a   Subbaraman, Harish ^b   Chen, Ray T ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b OMEGA OPTICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOSTRUCTURES; OPTICAL INSTRUMENTS; PHOTONIC CRYSTALS; WAVEGUIDES;

FLEXIBLE PLASTIC SUBSTRATES; FLEXIBLE SUBSTRATE; HIGH-DENSITY INTEGRATION; HYBRID STRUCTURE; MULTI-MODE INTERFERENCE; NANOMEMBRANES; PATTERNED SILICON; PHOTONIC CRYSTAL WAVEGUIDE; SECOND LAYER; SINGLE CRYSTAL SILICON; TRANSFER TECHNIQUE; TWO LAYERS; WAVEGUIDE DEVICE;

PHOTONIC DEVICES;

NANOMATERIAL; SILICON;

ARTICLE; CHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; NANOTECHNOLOGY; REFRACTOMETRY; SURFACE PLASMON RESONANCE; ULTRASTRUCTURE; YOUNG MODULUS;

ELASTIC MODULUS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; NANOSTRUCTURES; NANOTECHNOLOGY; REFRACTOMETRY; SILICON; SURFACE PLASMON RESONANCE;

EID: 77957098067     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.020086     Document Type: Article

References (21)

1. F. Cavallo, and M. G. Lagally, "Semiconductors turn soft: inorganic nanomembranes," Soft Matter 6(3), 439-455 (2010).
2. G. Qin, H. C. Yuan, G. K. Celler, W. Zhou, and Z. Ma, "Flexible microwave PIN diodes and switches employing transferrable single-crystal Si nanomembranes on plastic substrates," J. Phys. D Appl. Phys. 42(23),234006 (2009).
3. D.-H. Kim, J. A. Rogers; " Stretchable electronics: Materials strategies and devices," Adv. Mater. 20(24), 4887-4892 (2008).
4. M. G. Legally, "Group IV Crystalline Nanomembranes: Materials, Technology, and Potential Applications,"Proc. IEEE 4244-4403, 104-106 (2009).
5. E. Menard, R. G. Nuzzo, and J. A. Rogers, "Bendable single crystal silicon thin film transistors formed by printing on plastic substrates," Appl. Phys. Lett. 86(9), 093507 (2005).
6. F. Niklaus, E. Kalvesten, and G. Stemme, "Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays," J. Micromech. Microeng. 11(5), 509-513 (2001).
7. M. J. Zablocki, A. S. Sharkawy, O. Ebil, D. W. Prather, "Nanomembrane enabled nanophotonic devices," Proc. SPIE 7606, 76060V (2010).
8. W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, "Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes," J. Phys. D Appl. Phys. 42(23), 234007 (2009).
9. H. C. Yuan, Z. Ma, M. M. Roberts, D. E. Savage, and M. G. Lagally, "High-speed strained-single-crystal-silicon thin-film transistors on flexible polymers," J. Appl. Phys. 100(1), 013708 (2006).
10. H. C. Yuan, G. K. Celler, and Z. Ma, "7.8-GHz flexible thin-film transistors on a low-temperature plastic substrate," J. Appl. Phys. 102(3), 034501 (2007).
11. H.-C. Yuan, J. Shin, G. Qin, L. Sun, P. Bhattacharya, M. G. Lagally, G. K. Celler, and Z. Ma, "Flexible photodetectors on plastic substrates by use of printing transferred single-crystal germanium membranes," Appl. Phys. Lett. 94(1), 013102 (2009).
12. F. V. Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. V. Thourhout, T. F. Krauss, and R. Baets, "Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides," J. Lightwave Technol. 25(1), 151-156 (2007). (Pubitemid 46562995)
13. T. K. Saha, and W. Zhou, "High efficiency diffractive grating coupler based on transferred silicon nanomembrane overlay on photonic waveguide," J. Phys. D Appl. Phys. 42(8), 085115 (2009).
14. R. Ulrich, and T. Kamiya, "Resolution of self-images in planar optical waveguides," J. Opt. Soc. Am. 68(5), 583-592 (1978).
15. J. Z. Huang, R. Scarmozzino, and R. M. Osgood, Jr., "A new design approach to large input/output number multimode interference couplers and its application to low-crosstalk WDM routers," IEEE Photon. Technol. Lett. 10(9), 1292-1294 (1998).
16. A. Hosseini, D. N. Kwong, C.-Y. Lin, B. S. Lee, and R. T. Chen, "Output Formulation for Symmetrically- Excited one-to-N Multimode Interference Coupler," IEEE J. Sel. Top. Quant, Elect. 6(1), 53-60 (2010).
17. S. F. Mingaleev, A. E. Miroshnichenko, Y. S. Kivshar, and K. Busch, "All-optical switching, bistability, and slow-light transmission in photonic crystal waveguide-resonator structures," Phys. Rev. E Stat. Nonlin. Soft Matter Phys. 74(4), 046603 (2006).
18. T. Baba, "Slow light in photonic crystals," Nat. Photonics 2(8), 465-473 (2008).
19. P. Sanchis, P. Bienstman, B. Luyssaert, R. Baets, and J. Marti, "Analysis of butt coupling in photonic Crystals," IEEE J. Quantum Electron. 40(5), 541-550 (2004).
20. P. Pottier, M. Gnan, and R. M. De La Rue, "Efficient coupling into slow-light photonic crystal channel guides using photonic crystal tapers," Opt. Express 15(11), 6569-6575 (2007).
21. G. M. Cohen, P. M. Mooney, V. K. Paruchuri, and H. J. Hovel, "Dislocation-free strained silicon-on-silicon by in-place bonding," Appl. Phys. Lett. 86(25), 251902 (2005).