Half-tone proximity lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7716, Issue , 2010, Pages

  Harzendorf, Torsten ^a   Stuerzebecher, Lorenz ^a   Vogler, Uwe ^b   Zeitner, Uwe D ^a   Voelkel, Reinhard ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b SUSS MICROOPTICS SA   (Switzerland)

Author keywords

Blazed gratings; Half tone proximity lithography; Mask aligner; Micro optics; RET; Source mask optimization

Indexed keywords

2 MICRON; ANGULAR SPECTRA; BINARY PATTERNS; BLAZED GRATING; CONTINUOUS PROFILE; DIFFRACTION EFFECTS; HALF-TONE PROXIMITY LITHOGRAPHY; ILLUMINATION DISTRIBUTION; ILLUMINATION SYSTEM; INTENSITY DISTRIBUTION; LATERAL RESOLUTION; LIGHT DIFFRACTION; LITHOGRAPHY MASKS; MASK FEATURES; MATHEMATIC MODEL; MICRO LENS; MICRO-OPTICAL STRUCTURE; MICRO-OPTICS FABRICATION; OPTICS SYSTEMS; PARAMETER SETTING; PIXEL SIZE; PROJECTION LITHOGRAPHY; RESIST LAYERS; RET; SINGLE ELEMENT; SOURCE MASK OPTIMIZATION; SUBMICRON; SUBMICRON RESOLUTION; SUSS MICROTEC; TALBOT IMAGING;

CHROMIUM; DIFFRACTION; MICROOPTICS; OPTIMIZATION; PHOTOLITHOGRAPHY; PIXELS; SPECTRUM ANALYSIS;

ANGULAR DISTRIBUTION;

EID: 77957009650     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.854307     Document Type: Conference Paper

References (5)

1. Reimer, K., Quenzer, H. J., Jürss, M., Wagner, B., "Micro-optic fabrication using one-level gray-tone lithography", Proc. SPIE Vol. 3008, pp. 279-288, 2001
2. Suleski, T. J., Chuang, Y.-C., Deguzman, P. C., Barton, R. A., "Fabrication of optical microstructures trough fractional Talbot imaging", Proc. SPIE Vol. 5720, pp.86-93, 2005
3. Bryngdahl, O., "Image formation using self-imaging techniques", J. Opt. Soc. Am. Vol. 64 No. 4, 1973
4. Mack, C., Fundamental principles of optical lithography, John Wiley & Sons, Chichester UK, 2007
5. Christophersen, M., Phlips, B. F., "Gray-tone lithography using an optical diffuser and a contact aligner", Appl. Phys. Lett. 92, 194102, 2008