Micro fabrication of microlens arrays by micro dispensing

Polymers for Advanced Technologies

Volumn 21, Issue 9, 2010, Pages 632-639

  Cheng, Hsin Chung ^a,b   Wang, Chau Hsiang ^c,d   Huang, Chiung Fang ^a,b   Shen, Yung Kang ^a   Lin, Yi ^e   Sheu, Dong Yea ^f   Hu, Yi Han ^g  

^a TAIPEI MEDICAL UNIVERSITY   (Taiwan)

^b TAIPEI MEDICAL UNIVERSITY HOSPITAL   (Taiwan)

^c KAOHSIUNG MEDICAL UNIVERSITY   (Taiwan)

^d KAOHSIUNG MEDICAL UNIVERSITY HOSPITAL   (Taiwan)

^e TAKMING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^f NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^g LUNGHWA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

Focal length; Micro dispensing; Microlens arrays; Replication; Surface roughness

Indexed keywords

AFM; CONDUCTING LAYERS; COPPER LAYER; FOCAL LENGTHS; GLASS SUBSTRATES; MICRO HOT EMBOSSING; MICRO-DISPENSING; MICRO-LENS ARRAYS; MOLDING TEMPERATURE; NI MOLD; OPTICAL CHARACTERISTICS; OPTICAL MICROSCOPES; PROCESSING PARAMETERS; PROCESSING TEMPERATURE; REPLICATION; RESIN MATERIALS; SURFACE PROFILERS; SURFACE PROFILES; TAGUCHI'S METHODS;

DIE CASTING INSERTS; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; FOCUSING; GLASS; METAL ANALYSIS; MICROLENSES; MICROOPTICS; MOLDS; PROCESSING; RESINS; SUBSTRATES; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE TENSION;

OPTICAL INSTRUMENT LENSES;

EID: 77956609288     PISSN: 10427147     EISSN: 10991581     Source Type: Journal    
DOI: 10.1002/pat.1476     Document Type: Article

References (14)

1. D. Daly, Microlens Arrays. Taylor & Francis Inc, London, UK, 2001.
2. D. L. MacFarlane, V. Narayan, J. A. Tatum,W. R. Cox, T. Chen, D. J. Hayes, Photon. Technol. Lett. 1994, 6, 1112.
3. R. Danzebrink, M. A. Aegerter, Thin Solid Films 1999, 351, 115-1118.
4. R. Danzebrink, M. A. Aegerter, Thin Solid Films 2001, 392, 223-225.
5. C. T. Pan, C. H. Chin, C. C. Hsieh, Appl. Optic 2004, 43, 5939.
6. H. Y. Chou, S. B. Chang, Frank Lin, C. R. Yang, Roger Lou,W. K. Kuo, C. J. Chen, W. H. Huang, Proceedings of ASPE Annual Meeting, St. Louis, U.S.A. 1998, 189.
7. D. Y. Sheu, J. Y. Chiang, W. L. Hung., Paper Summary of the 22nd National Conference on Mechanical Engineering, Chung-Li. 2005, 404.
8. X. J. Shen, L. W. Pan, L. W. Lin., Sensor Actuator A 2002, 97-98, 428-4433.
9. H. Yabn, M. Shimomura, Langmuir 2005, 21, 1709-1711.
10. R. Guo, S. H. Xiao, X. M. Zhai, J. W. Li, A. P. Xia, W. H. Huang, Optic Express 2006, 14, 810-816.
11. Y. K. Shen., Polym. Eng. Sci. 2006, 46, 1797.
12. T. Young, Philos. Trans. R. Soc. 1805, 95, 65.
13. Y. H. Hu., Study on fabrication of mold insert for microlens array by micro dispensing. Master Thesis, Lunghwa University of Science and Technology Taipei, Taiwan. 2006.
14. G. S. Peace, Taguchi methods. Addison-Wesley, New York, 1993.