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Volumn 13, Issue 11, 2010, Pages

Tribological, thermal, and wear characteristics of poly(phenylene sulfide) and polyetheretherketone retaining rings in interlayer dielectric CMP

(7) Wei, Xiaomin a Zhuang, Yun a,b Sampurno, Yasa a,b Sudargho, Fransisca a,b Wargo, Christopher c Borucki, Leonard b Philipossian, Ara a,b

a University of Arizona (United States)

b Araca Inc (United States)

c ENTEGRIS INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL-MECHANICAL PLANARIZATION PROCESS; COEFFICIENT OF FRICTIONS; INTER-LAYER DIELECTRICS; POLY(PHENYLENE SULFIDE); POLYPHENYLENE SULFIDES; RETAINING RING; WEAR CHARACTERISTICS; WEAR RATES; WEAR TEST;

AROMATIC COMPOUNDS; MOLECULAR MASS;

FASTENERS;

EID: 77956591471 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.3483752 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.