Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an Arbitrary gas mixture

2006 25th International Conference on Microelectronics, MIEL 2006 - Proceedings

Volumn , Issue , 2006, Pages 103-106

  Djuric Z ^a   Jaksi C O ^a   Jokic I ^a   Frantlovic M ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

FREQUENCY FLUCTUATION; LANGEVIN; LANGMUIR ISOTHERM; MEMS/NEMS; PARAMETERS OPTIMIZATION; POISSONIAN; SORPTION DYNAMICS; SORPTION PROCESS;

GAS MIXTURES; MICROELECTRONICS; POWER SPECTRAL DENSITY; SORPTION;

DENSITY OF GASES;

EID: 77956511905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMEL.2006.1650904     Document Type: Conference Paper

References (10)

1. P.G. Datskos et al., " Micro and nanocantilever Sensors" , in Encyclopedia of Nanoscience and Technology, Ed. H.S. Nalwa, American Publishers, 2004.
2. N.V. Lavrik et al., " Cantilever transducers as a platform for chemical and biological sensors" , Rev. Sci. Instr., 2004, vol.75, pp. 1-25.
3. M.J. Sepaniak et al., " Microcantilever transducers: a new approach in sensor technology" , An.Chem., 2002, vol.74, 568.
4. B. Ilic et al., " Enumeration of DNA molecules bound to a nanomechanical oscillator" , Nano Letters, 2005, vol.5, pp. 925-929.
5. Z. Djurić et al., " Adsorption-desorption noise in micromechanical resonant structures" , Sens. and Actuators A, 2002, vol.96, pp. 244-251.
6. C.T.-C. Nguyen, " Micromechanical resonators for oscillators and filters" , Proc. 1995 IEEE International Ultrasonic Symposium, Seattle, WA, 1995, pp. 489-499
7. I. Langmuir, " Vapor pressures, evaporation, condensation and adsorption" , J.Amer.Chem.Soc., 1932, vol.54, pp. 2798-2832.
8. Z. Djurić et al., " Adsorbed mass and resonant frequency fluctuations of a microcantilever caused by adsorption and desorption of particles of two gases" , in Proc. 24th MIEL, Niš, 2004, vol.1, pp. 197-200.
9. K.M. van Vliet, J.R. Fasset, " Fluctuations due to electronic transitions and transport in solids" , in Fluctuation Phenomena in Solids, ed. by R.E.Burgess, Academic Press, N.Y. , 1965.
10. M. Jaroniek, M. Kruk, " Standard nitrogen adsorption data for characterization of nanoporous silicas," Langmuir, 1997, vol.15, pp. 5410-5413.