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Volumn , Issue , 2010, Pages 3124-3127
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A new hybrid macro- and micro-range fast tool servo
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Author keywords
Fast tool servo(FTS); Flexure hinge; Laser sensor; PZT actuator; Voice coil motor(VCM)
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Indexed keywords
FAST TOOL SERVO;
FLEXURE HINGE;
LASER SENSOR;
PZT ACTUATOR;
VOICE COIL MOTORS;
ACTUATORS;
MECHANICS;
SENSORS;
HINGES;
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EID: 77956082297
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/MACE.2010.5535544 Document Type: Conference Paper |
Times cited : (7)
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References (8)
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