Fabrication of micro probe-type electrodes for microelectro-chemical machining using microfabrication

International Journal of Modern Physics B

Volumn 24, Issue 15-16, 2010, Pages 2639-2644

  Park, W B ^a   Choi, J H ^a   Park, C W ^a   Kim, G M ^a   Shin, H S ^b   Chu, C N ^b   Kim, B H ^c  

^a Kyungpook National University   (South Korea)

^b Seoul National University   (South Korea)

^c Soongsil University   (South Korea)

Author keywords

Micro electro chemical machining (MECM); micro electrode; microfabrication

Indexed keywords

EID: 77956041005     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0217979210065398     Document Type: Conference Paper

References (4)

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2. Kirchner, V., Cagnon, L., Schuster, R., and Gerhard, E., Applied Physics Letters 79, 1721 (2001).
3. Kim, B. H., Lee, Y. S., Choi, D. K., and Chu, C. N., Journal of the Korean Society for Precision Engineering 22 (4), 167 (2005).
4. Kim, G. M., Choi, D. K., and Chu, C. N., Journal of the Korean Society for Precision Engineering 15 (12), 55 (1998).