Aerial image calculation by eigenvalues and eigenfunctions of a matrix that includes source, pupil, and mask

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7640, Issue , 2010, Pages

  Yamazoe, Kenji ^a,b   Neureuther, Andrew R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b CANON INC   (Japan)

Author keywords

Aerial image calculation; eigenfunction; eigenvalue; entropy; matrix representation

Indexed keywords

ENTROPY; MASKS;

AERIAL IMAGES; DEGREE OF COHERENCE; EIGEN-VALUE; MATRIX REPRESENTATION; PARTIALLY COHERENT IMAGING; POSITIVE SEMIDEFINITE MATRICES; TRANSMISSION CROSS COEFFICIENT; VON NEUMANN ENTROPY;

EIGENVALUES AND EIGENFUNCTIONS;

EID: 77955990742     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.846666     Document Type: Conference Paper

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