Design, fabrication, and test of an on-chip micro flow cytometer with integrated out-of-plane microlenses

Microsystem Technologies

Volumn 16, Issue 8-9, 2010, Pages 1569-1576

  Shao, Guocheng ^a   Wang, Wanjun ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CELL COUNTING; COMMERCIAL SOFTWARE; DETECTION EFFICIENCY; ENTIRE SYSTEM; ESSENTIAL COMPONENT; FLUORESCENT LIGHT; LITHOGRAPHY PROCESS; MICRO-FLOW; MICRO-LENS; NUMERICAL SIMULATION; ON CHIPS; ON-CHIP OPTICAL DETECTION; OPTICAL SIMULATION; OUT-OF-PLANE; OUT-OF-PLANE MICROLENS; PRE-ALIGNED; SAMPLE CELL; SHEATH FLOWS; THREE-DIMENSIONAL HYDRO-FOCUSING; ULTRA-VIOLET; VERTICAL DIRECTION;

COMPUTER SIMULATION; COMPUTER SOFTWARE; FIBER OPTICS; FOCUSING; LITHOGRAPHY; MICROLENSES; OPTICAL FIBERS;

OPTICAL FIBER FABRICATION;

EID: 77955852761     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1097-6     Document Type: Conference Paper

References (13)

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