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Volumn 7, Issue 7-8, 2010, Pages 1781-1783
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Atom probe extended to AlGaN: Three-dimensional imaging of a Mg-doped AlGaN/GaN superlattice
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Author keywords
AlGaN GaN; Doping; Laser deposition; SIMS; Superlattices
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Indexed keywords
ALUMINUM GALLIUM NITRIDE;
ATOM LASERS;
DOPING (ADDITIVES);
GALLIUM NITRIDE;
III-V SEMICONDUCTORS;
MAGNESIUM;
NITRIDES;
PROBES;
PULSED LASERS;
SECONDARY ION MASS SPECTROMETRY;
SEMICONDUCTOR ALLOYS;
SEMICONDUCTOR DOPING;
SEMICONDUCTOR LASERS;
SUPERLATTICES;
ALGAN/GAN;
ATOM-PROBE TOMOGRAPHY;
LASER DEPOSITIONS;
RANDOM DISTRIBUTION;
SPATIAL INFORMATIONS;
THREE DIMENSIONAL CHEMICALS;
THREE DIMENSIONAL IMAGING;
THREE-DIMENSIONAL ELEMENTS;
WIDE BAND GAP SEMICONDUCTORS;
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EID: 77955785225
PISSN: 18626351
EISSN: 16101642
Source Type: Journal
DOI: 10.1002/pssc.200983510 Document Type: Conference Paper |
Times cited : (5)
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References (7)
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