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Volumn 322, Issue 21, 2010, Pages 3293-3297
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Microstructural and magnetic properties of thick (≥10 μm) magnetron sputtered barium ferrite films
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Author keywords
AFM; Barium ferrite; Millimeter wave; RBS; Sputtering; XRD
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Indexed keywords
ALUMINA;
ALUMINUM OXIDE;
ATOMIC FORCE MICROSCOPY;
BARIUM;
BARIUM COMPOUNDS;
DEPOSITION RATES;
FERRITE;
IRON COMPOUNDS;
MAGNETIC PROPERTIES;
MAGNETRON SPUTTERING;
MICROWAVE DEVICES;
MILLIMETER WAVES;
RUBIDIUM;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SPUTTERING;
X RAY DIFFRACTION;
BARIUM FERRITES;
COMPOSITIONAL PROPERTIES;
DC MAGNETIC PROPERTIES;
HIGH DEPOSITION RATES;
MAGNETOSTATIC PROPERTIES;
REACTIVE RF MAGNETRON SPUTTERING;
RUTHERFORD BACKSCATTERING SPECTROMETRY;
SPUTTERING GAS PRESSURE;
MAGNETIC THICK FILMS;
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EID: 77955574297
PISSN: 03048853
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jmmm.2010.06.011 Document Type: Article |
Times cited : (11)
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References (21)
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