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Applied Surface Science

Volumn 257, Issue 1, 2010, Pages 109-115

Effect of composition and deposition temperature on the characteristics of Ga doped ZnO thin films

(6) Kim, Y H a,b Jeong, J a Lee, K S a Cheong, B a Seong, T Y b Kim, W M a

a Korea Institute of Science and Technology (South Korea)

b Korea University (South Korea)

Author keywords

Deposition temperature; Ga doped ZnO; rf magnetron sputtering; Transparent conducting oxide

Indexed keywords

ELECTRIC CONDUCTIVITY; GALLIUM; II-VI SEMICONDUCTORS; LIGHT ABSORPTION; MAGNETRON SPUTTERING; METALLIC FILMS; STRUCTURAL PROPERTIES; SUBSTRATES; THIN FILMS; TRANSPARENT CONDUCTING OXIDES; ZINC OXIDE;

COLUMNAR STRUCTURES; DEPOSITION TEMPERATURES; FIGURE OF MERIT (FOM); GA-DOPED ZNO; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; TEMPERATURE DEPENDENT;

OPTICAL FILMS;

EID: 77955515827 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2010.06.045 Document Type: Article

Times cited : (23)

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