Analytical comparison for square, rectangular and circular diaphragms in MEMS applications

2010 International Conference on Electronic Devices, Systems and Applications, ICEDSA 2010 - Proceedings

Volumn , Issue , 2010, Pages 297-299

  Khakpour, R ^a   Mansouri, Solmaz R M ^a   Bahadorimehr, A R ^b  

^a UNIVERSITY PUTRA MALAYSIA   (Malaysia)

^b INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

Author keywords

Diaphragm; MEMS; Stress

Indexed keywords

CIRCULAR DIAPHRAGMS; CIRCULAR SHAPE; FABRICATION PROCESS; MEMS APPLICATIONS; MEMSDEVICES; MICRO PUMP; PARAMETER OPTIMIZATION; WORKING PRINCIPLES;

ELECTRON DEVICES; THERMOELECTRIC EQUIPMENT; VIBRATION ANALYSIS;

DIAPHRAGMS;

EID: 77955288672     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICEDSA.2010.5503057     Document Type: Conference Paper

References (2)

1. S. Timshenko and S. Woinosky-Krieger, Theory of Plates and Shells, McGraw Hill Classic Textbook Reissue (1987).
2. R. Schellin, G. Hess, W. Kuhnel, C. Thielemann, D. Trost, J. Wacker, and R. Steinman, Sensors and Actuators A, 41-42, pp. 287-292, (1994).