Polymer-assisted deposition of homogeneous metal oxide films to produce nuclear targets

Nature Protocols

Volumn 5, Issue 8, 2010, Pages 1440-1446

  Ali, Mazhar N ^a,b   Garcia, Mitch A ^a,b   Parsons Moss, T ^a,b   Nitsche, Heino ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

METAL OXIDE; POLYMER; SILICON; SILICON NITRIDE;

ARTICLE; CHEMICAL PROCEDURES; FILM; INTERMETHOD COMPARISON; MATERIAL COATING; PHYSICAL CHEMISTRY; PRIORITY JOURNAL; SURFACE PROPERTY; THICKNESS;

CHEMISTRY; ELEMENTARY PARTICLES; POLYMERS; SILICON COMPOUNDS;

EID: 77955221777     PISSN: 17542189     EISSN: 17502799     Source Type: Journal    
DOI: 10.1038/nprot.2010.105     Document Type: Article

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