New process development for planar-type CIC tunneling diodes

IEEE Electron Device Letters

Volumn 31, Issue 8, 2010, Pages 809-811

  Choi, Kwangsik ^a   Yesilkoy, Filiz ^a   Chryssis, Athanasios ^a   Dagenais, Mario ^a   Peckerar, Martin ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

Bow tie antenna; metalinsulatormetal (MIM) diode; optical antenna; surface plasmon; surface plasmon resonance (SPR); tunneling diode

Indexed keywords

BOILING WATER; BOW TIE; BOW-TIE ANTENNA; BOW-TIE ANTENNAS; BUFFERED OXIDE ETCHANTS; CURRENT-VOLTAGE RELATIONSHIP; DOPED POLYSILICON; E-BEAM LITHOGRAPHY; HIGH SENSITIVITY; HYDROGEN SILSESQUIOXANE; NATIVE OXIDE LAYER; NEW PROCESS; OPTICAL ANTENNAS; SURFACE OXIDATIONS; THIN OXIDES; TUNNELING DIODES;

ANTENNAS; DIODES; MIM DEVICES; OPTICAL INSTRUMENTS; OXIDATION; PLASMONS; POLYSILICON; REACTIVE ION ETCHING; SURFACE PLASMON RESONANCE; TUNNELING (EXCAVATION);

RESONANT TUNNELING DIODES;

EID: 77955138888     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2010.2049637     Document Type: Article

References (12)

1. J. W. Dees, "Detection and harmonic generation in the sub-millimeter wavelength region," Microw. J., vol.9, no.25, pp. 48-55, 1966.
2. L. M. Matarrese and K. M. Evenson, "Improved coupling to infrared whisker diodes by use of antenna theory," Appl. Phys. Lett., vol.17, no.1, pp. 8-10, Jul. 1970.
3. S. Faris, T. Gustafson, and J. Wiesner, "Detection of optical and infrared radiation with DC-biased electron-tunneling metal-barrier-metal diodes," IEEE J. Quantum Electron., vol.QE-9, no.7, pp. 737-745, Jul. 1973.
4. T. K. Gustafson, R. V. Schmidt, and J. R. Perucca, "Optical detection in thin-film metal-oxide-metal diodes," Appl. Phys. Lett., vol.24, no.12, pp. 620-622, Jun. 1974.
5. M. Heiblum, S. Wang, J. Whinnery, and T. Gustafson, "Characteristics of integrated MOM junctions at dc and at optical frequencies," IEEE J. Quantum Electron., vol.QE-14, no.3, pp. 159-169, Mar. 1978.
6. 2-laser emissions with difference frequencies up to 176 GHz," Appl. Phys. B: Lasers Opt., vol.66, no.3, pp. 327-332, 1998.
7. D. P. Fromm, A. Sundaramurthy, P. J. Schuck, G. Kino, and W. E. Moerner, "Gap-dependent optical coupling of single "bowtie" nano-antennas resonant in the visible," Nano Lett., vol.4, no.5, pp. 957-961, May 2004.
8. A. Sundaramurthy, K. B. Crozier, G. S. Kino, D. P. Fromm, P. J. Schuck, and W. E. Moerner, "Field enhancement and gap-dependent resonance in a system of two opposing tip-to-tip Au nanotriangles," Phys. Rev. B, Condens. Matter, vol.72, no.16, p. 165 409-6, Oct. 2005.
9. J. W. Beck, "Boiling water oxidation rates on silicon," J. Appl. Phys., vol.33, no.7, p. 2391, Jul. 1962.
10. J. G. Simmons, "Generalized formula for the electric tunnel effect between similar electrodes separated by a thin insulating film," J. Appl. Phys., vol.34, no.6, pp. 1793-1803, Jun. 1963.
11. P. Esfandiari, G. Bernstein, P. Fay, W. Porod, B. Rakos, A. Zarandy, B. Berland, L. Boloni, G. Boreman, B. Lail, B. Monacelli, and A. Weeks, "Tunable antenna-coupled metal-oxide-metal (MOM) uncooled IR detector (Invited Paper)," Proc. SPIE, vol.5783, pp. 470-482, 2005.
12. S. Krishnan, H. La Rosa, E. Stefanakos, S. Bhansali, and K. Buckle, "Design and development of batch fabricatable metal-insulator-metal diode and microstrip slot antenna as rectenna elements," Sens. Actuators A, Phys., vol.142, no.1, pp. 40-47, Mar. 2008.