|
|
Volumn 6, Issue SUPPL. 1, 2009, Pages
|
|
High productive deposited Mo layers for back ohmic contacts of solar cells
a
|
|
Author keywords
Back ohmic contacts; Electron beam deposition; Molybdenum; Photovoltaic applications; Plasma activation
|
|
Indexed keywords
BOROFLOAT GLASS;
CELL EFFICIENCY;
DC MAGNETRON SPUTTERING;
DEPOSITION TECHNOLOGY;
ELECTRICAL RESISTANCES;
ELECTRON BEAM DEPOSITION;
ELECTRON BEAM DEPOSITIONS;
HIGH RATE;
LAYER FORMATION;
PHOTOVOLTAIC APPLICATIONS;
PLASMA ACTIVATION;
RESIDUAL GAS;
STATE OF THE ART;
SUBSTRATE MATERIAL;
BIOMECHANICS;
CHEMICAL MODIFICATION;
ELECTRIC CONTACTORS;
ELECTRIC RESISTANCE;
ELECTRON BEAMS;
ELECTRON OPTICS;
MECHANICAL PROPERTIES;
OHMIC CONTACTS;
PLASMA DEPOSITION;
STAINLESS STEEL;
MOLYBDENUM;
|
|
EID: 77954950719
PISSN: 16128850
EISSN: 16128869
Source Type: Journal
DOI: 10.1002/ppap.200930203 Document Type: Conference Paper |
|
Times cited : (4)
|
|
References (11)
|
