Boron and Phosphorus Quantification in Sol-Gel BPSG Glasses by XPS

Surface Science Spectra

Volumn 10, Issue 1, 2003, Pages 40-46

  Armelao, Lidia ^a   Barreca, Davide ^a   Scotti, Roberto ^b   Canevali, Carmen ^b   Morazzoni, Franca ^b   Tondello, Eugenio ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; PHOSPHORUS; SOL-GEL PROCESS; SOL-GELS; X RAY PHOTOELECTRON SPECTROSCOPY;

BOROPHOSPHOSILICATE GLASS; CRACK FREE; DENSIFICATIONS; GEL DRYING; MONOLITHICS; SOL'GEL; SOL-GEL ROUTES; TETRAMETHOXY SILANES; TRIMETHYLBORATE; TRIMETHYLPHOSPHITE;

GLASS;

EID: 77954361357     PISSN: 10555269     EISSN: 15208575     Source Type: Journal    
DOI: 10.1116/11.20040302     Document Type: Article

References (5)

1. K.Nassau, R. A.Levy, and D. L.Chadwick, J. Electrochem. Soc. 132, 409 (1985). 10.1149/1.2113853
2. W.Kern and G. L.Schnable, RCA Rev. 43, 423 (1982).
3. C.Canevali, R.Scotti, A.Vedda, M.Mattoni, F.Morazzoni, L.Armelao, D.Barreca, and G.Bottaro, Chem. Mater. 16, 315 (2004). 10.1021/cm031118s
4. J. M.Moulder, W. F.Stickle, P. E.Sobol, and K. D.Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Eden Prairie, MN, 1992).
5. D. A.Shirley, Phys. Rev. 55, 4709 (1972).