-
1
-
-
77954181945
-
-
International Technology Roadmafor Semiconductors, 2005 edition.
-
International Technology Roadmap for Semiconductors, 2005 edition, www.itrs.net.
-
-
-
-
2
-
-
0000179978
-
Scaling properties and electromigration resistance of sputtered Ag metallization lines
-
DOI 10.1063/1.1345801
-
M. Hauder, J. Gstottner, W. Hansch, and D. Schmitt-Landsiedel, Appl. Phys. Lett. APPLAB 0003-6951 78, 838 (2001). 10.1063/1.1345801 (Pubitemid 33630367)
-
(2001)
Applied Physics Letters
, vol.78
, Issue.6
, pp. 838-840
-
-
Hauder, M.1
Gstottner, J.2
Hansch, W.3
Schmitt-Landsiedel, D.4
-
3
-
-
4544282492
-
-
MIENEF 0167-9317,. 10.1016/j.mee.2004.07.041
-
W. Zhang, S. H. Brongersma, O. Richard, B. Brijs, R. Palmans, L. Froyen, and K. Maex, Microelectron. Eng. MIENEF 0167-9317 76, 146 (2004). 10.1016/j.mee.2004.07.041
-
(2004)
Microelectron. Eng.
, vol.76
, pp. 146
-
-
Zhang, W.1
Brongersma, S.H.2
Richard, O.3
Brijs, B.4
Palmans, R.5
Froyen, L.6
Maex, K.7
-
4
-
-
0000453141
-
-
PRLTAO 0031-9007,. 10.1103/PhysRevLett.82.446
-
H. Nienhaus, H. S. Bergh, B. Gergen, A. Majumdar, W. H. Weinberg, and E. W. McFarland, Phys. Rev. Lett. PRLTAO 0031-9007 82, 446 (1999). 10.1103/PhysRevLett.82.446
-
(1999)
Phys. Rev. Lett.
, vol.82
, pp. 446
-
-
Nienhaus, H.1
Bergh, H.S.2
Gergen, B.3
Majumdar, A.4
Weinberg, W.H.5
McFarland, E.W.6
-
5
-
-
0032620314
-
-
APPLAB 0003-6951,. 10.1063/1.123256
-
H. Nienhaus, H. S. Bergh, B. Gergen, A. Majumdar, W. H. Weinberg, and E. W. McFarland, Appl. Phys. Lett. APPLAB 0003-6951 74, 4046 (1999). 10.1063/1.123256
-
(1999)
Appl. Phys. Lett.
, vol.74
, pp. 4046
-
-
Nienhaus, H.1
Bergh, H.S.2
Gergen, B.3
Majumdar, A.4
Weinberg, W.H.5
McFarland, E.W.6
-
6
-
-
0002905471
-
-
JJAPA5 0021-4922,. 10.1143/JJAP.8.749
-
T. Arizumi and M. Hirose, Jpn. J. Appl. Phys. JJAPA5 0021-4922 8, 749 (1969). 10.1143/JJAP.8.749
-
(1969)
Jpn. J. Appl. Phys.
, vol.8
, pp. 749
-
-
Arizumi, T.1
Hirose, M.2
-
7
-
-
0029256236
-
-
SUSCAS 0039-6028,. 10.1016/0039-6028(94)00791-8
-
R. F. Schmitsdorf, T. U. Kampen, and W. Monch, Surf. Sci. SUSCAS 0039-6028 324, 249 (1995). 10.1016/0039-6028(94)00791-8
-
(1995)
Surf. Sci.
, vol.324
, pp. 249
-
-
Schmitsdorf, R.F.1
Kampen, T.U.2
Monch, W.3
-
8
-
-
36149010540
-
-
PRVAAH 0096-8250,. 10.1103/PhysRev.127.2006
-
C. R. Crowell, W. G. Spitzer, L. E. Howarth, and E. E. LaBate, Phys. Rev. PRVAAH 0096-8250 127, 2006 (1962). 10.1103/PhysRev.127.2006
-
(1962)
Phys. Rev.
, vol.127
, pp. 2006
-
-
Crowell, C.R.1
Spitzer, W.G.2
Howarth, L.E.3
Labate, E.E.4
-
9
-
-
51349110053
-
-
NNOTER 0957-4484,. 10.1088/0957-4484/19/37/375706
-
A. Bannani, C. A. Bobisch, M. Matena, and R. Moller, Nanotechnology NNOTER 0957-4484 19, 375706 (2008). 10.1088/0957-4484/19/37/375706
-
(2008)
Nanotechnology
, vol.19
, pp. 375706
-
-
Bannani, A.1
Bobisch, C.A.2
Matena, M.3
Moller, R.4
-
10
-
-
68349127561
-
-
JVTBD9 1071-1023,. 10.1116/1.3136761
-
J. J. Garramone, J. R. Abel, I. L. Sitnitsky, R. L. Moore, and V. P. LaBella, J. Vac. Sci. Technol. B JVTBD9 1071-1023 27, 2044 (2009). 10.1116/1.3136761
-
(2009)
J. Vac. Sci. Technol. B
, vol.27
, pp. 2044
-
-
Garramone, J.J.1
Abel, J.R.2
Sitnitsky, I.L.3
Moore, R.L.4
Labella, V.P.5
-
11
-
-
27944437312
-
Combined molecular beam epitaxy low temperature scanning tunneling microscopy system: Enabling atomic scale characterization of semiconductor surfaces and interfaces
-
DOI 10.1116/1.1941167
-
M. Krause, A. Stollenwerk, C. Awo-Affouda, B. Maclean, and V. P. LaBella, J. Vac. Sci. Technol. B JVTBD9 1071-1023 23, 1684 (2005). 10.1116/1.1941167 (Pubitemid 43127267)
-
(2005)
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
, vol.23
, Issue.4
, pp. 1684-1689
-
-
Krause, M.1
Stollenwerk, A.2
Awo-Affouda, C.3
MacLean, B.4
Labella, V.P.5
-
12
-
-
17244365811
-
-
PRLTAO 0031-9007,. 10.1103/PhysRevLett.61.2368
-
L. D. Bell and W. J. Kaiser, Phys. Rev. Lett. PRLTAO 0031-9007 61, 2368 (1988). 10.1103/PhysRevLett.61.2368
-
(1988)
Phys. Rev. Lett.
, vol.61
, pp. 2368
-
-
Bell, L.D.1
Kaiser, W.J.2
-
13
-
-
4243292542
-
-
PRLTAO 0031-9007,. 10.1103/PhysRevLett.66.2511
-
M. Prietsch and R. Ludeke, Phys. Rev. Lett. PRLTAO 0031-9007 66, 2511 (1991). 10.1103/PhysRevLett.66.2511
-
(1991)
Phys. Rev. Lett.
, vol.66
, pp. 2511
-
-
Prietsch, M.1
Ludeke, R.2
-
14
-
-
0003752338
-
-
(Cambridge University Press, Cambridge).
-
A. Zangwill, Physics at Surfaces (Cambridge University Press, Cambridge, 1988).
-
(1988)
Physics at Surfaces
-
-
Zangwill, A.1
-
15
-
-
26444545556
-
-
JVTBD9 1071-1023,. 10.1116/1.1306334
-
R. P. Lu, B. A. Morgan, K. L. Kavanagh, C. J. Powell, P. J. Chen, F. G. Serpa, and W. F. Egelhoff, Jr., J. Vac. Sci. Technol. B JVTBD9 1071-1023 18, 2047 (2000). 10.1116/1.1306334
-
(2000)
J. Vac. Sci. Technol. B
, vol.18
, pp. 2047
-
-
Lu, R.P.1
Morgan, B.A.2
Kavanagh, K.L.3
Powell, C.J.4
Chen, P.J.5
Serpa, F.G.6
Egelhoff Jr., W.F.7
|