Opportunities and challenges to sustainable manufacturing and CMP

Materials Research Society Symposium Proceedings

Volumn 1157, Issue , 2010, Pages 49-55

  Dornfeld, David A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN FOR THE ENVIRONMENT; ENERGY CONSUMPTION; ENGINEERING ASPECTS; PROCESS MODELING; PROCESS STEPS; RESEARCH OPPORTUNITIES; SEMICONDUCTOR MANUFACTURING; SUSTAINABLE MANUFACTURING;

GAS EMISSIONS; GLOBAL WARMING; GREENHOUSE GASES; MANUFACTURE;

ENVIRONMENTAL IMPACT;

EID: 77954025404     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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5. Inventory of U.S. Greenhouse Gas Emission & Sinks: 1990-2004, EPA, April 2006.
6. Boyd, S., LMAS Green Manufacturing Research Presentation, 2008.
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10. Dornfeld, D. and Wright, P., "Technology Wedges for Implementing Green Manufacturing," Trans. North American Manufacturing Research Institute, 2007, vol. 35, pp. 193-200.
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